Uhlu olunemininingwane yokulawula: imithetho emisha yama-chip yase-Dutch ithinta ukuthi imaphi amamodeli e-DUV?

I-Tibco News, ngoJuni 30, uhulumeni waseDashi wakhipha imithetho yakamuva mayelana nokulawulwa kokuthekelisa kwemishini ye-semiconductor, abanye abezindaba bahumusha lokhu njengokulawulwa kwe-photolithography ngokumelene neChina kwaphinde kwakhuphukela kuwo wonke ama-DUV.Eqinisweni, le mithetho emisha yokulawula ukuthekelisa iqondise kubuchwepheshe bokukhiqiza ama-chip obungama-45nm nangaphansi, okuhlanganisa imishini yesimanjemanje ye-ALD yokubeka i-athomu, imishini yokukhula ye-epitaxial, imishini yokubeka i-plasma kanye nezinhlelo ze-immersion lithography, kanye nobuchwepheshe, isofthiwe esetshenzisiwe. ukusebenzisa nokuthuthukisa imishini enjalo ethuthukisiwe.

Esitatimendeni esiya ku-Tibco, i-ASML igcizelele ukuthi imithetho kahulumeni wase-Dutch emisha yokulawula ukuthekelisa ihlanganisa kuphela amamodeli akamuva e-DUV, okuhlanganisa i-TWINSCAN NXT:2000i kanye nezinhlelo ze-lithography zokucwiliswa ezilandelayo.I-EUV lithography ibikhawulelwe ngaphambilini, futhi ukuthunyelwa kwamanye amasistimu akulawulwa uhulumeni wamaDashi.Ngokolwazi olusemthethweni lwewebhusayithi ye-ASML, isistimu ye-DUV immersion lithography, okuhlanganisa: TWINSCAN NXT:2050i, NXT:2050i, NXT:1980Di three lithography machine, lezi zingenza inqubo ye-wafer 38nm ~ 45nm.

 

Ngaphezu kwalokho, imishini eyomile ye-DUV lithography ekwazi ukucubungula i-wafer ngaphezu kuka-45nm, njengenqubo engu-65nm~220nm, efana ne-TWINSCAN XT:400L, XT:1460K, NXT:870, njll., ayifakiwe kuhlu lwezijeziso zase-Dutch.

Uhlu lwama-Dutch control, njengoba luhunyushwe ngu-Tibco, lumi kanje:

Umthethonqubo i-MinBuza.2023.15246-27 okhishwe uNgqongqoshe Wezohwebo Nezokuthuthukiswa Kwamazwe Ngamazwe wase-Netherlands uhlinzeka ngezimfuneko zelayisensi yokuthunyelwa kwamanye amazwe okokusebenza kokukhiqiza okuthuthukisiwe kwama-semiconductors angazange ashiwo ngaphambili ku-Annex I of Regulation No. 2021/821 (ehlobene ne-semiconductor ethuthukisiwe izinto zokukhiqiza)

I-Athikili 2: Lo mthethonqubo uvimbela ukuthunyelwa kwamanye amazwe amathuluzi okukhiqiza ama-semiconductor athuthukile evela e-Netherlands ngaphandle kwemvume kaNgqongqoshe.

I-athikili 3:

1. Isicelo semvume eshiwo ku-Article 2 sizokwenziwa ngumthumeli ngaphandle futhi sithunyelwe kumshushisi.

2. Kunoma yikuphi, isicelo sizoqukatha:

a）igama nekheli lomthumeli;

b）Igama nekheli lomamukeli kanye nomsebenzisi wokugcina wemishini ethuthukisiwe yokukhiqiza i-semiconductor;

c）Igama nekheli lomamukeli kanye nomsebenzisi wokugcina wemishini ethuthukisiwe yokukhiqiza i-semiconductor.

I-3, kunoma yikuphi, umshushisi unelungelo lokucela umdayisi ukuthi anikeze inkontileka yokuthekelisa, kanye nesitatimende ekusetshenzisweni kokuphela.

I-athikili 4:

Ilayisensi echazwe ku-Article 2, ingase ibe ngaphansi kwemibandela nezinhlinzeko.

Ukunikezwa kwelayisensi echazwe ku-Athikili 2 kungaba khona kanye neziqu.

I-athikili V:

Amalayisense ashiwo ku-Article II angase ahoxiswe ezimeni ezilandelayo:

a) Ilayisensi ikhishwe ngokusekelwe olwazini olungalungile noma olungaphelele;

b) Imibandela, imibandela kanye nemikhawulo yelayisensi ayizange ilandelwe;

c) Ngezizathu zenqubomgomo kazwelonke kanye nezokuphepha.